Cathodoluminescence study of synthesized diamond films formed by magneto-microwave plasma CVD and usual microwave plasma CVD has been carried out for the first time. The visible luminescence spectra of these diamond films show that peaks occur at different energies between 2.4–2.8 eV (green to purple-blue by visual inspection), depending on the deposition conditions. These spectra can be classified into so-called “band A” luminescence commonly observed in all types of bulk diamond. The growth sectors of (100) (bright visible emission) and (111) (dark) can be differentiated by the intensity of luminescence. These features are analogous to the luminescent properties of high-pressure synthesized diamond.
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