Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Y. Yamakawa*, K. Sano, R. Karasawa, T. Yanagitani

*この研究の対応する著者

研究成果: Conference contribution

抄録

In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ2135-2138
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7 26
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域Taiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • 化学的な安全衛生
  • 器械工学
  • 電子工学および電気工学

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