Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Y. Yamakawa, K. Sano, R. Karasawa, Takahiko Yanagitani

    研究成果: Conference contribution

    抄録

    In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

    元の言語English
    ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    出版者Institute of Electrical and Electronics Engineers Inc.
    ページ2135-2138
    ページ数4
    ISBN(電子版)9781538627310
    DOI
    出版物ステータスPublished - 2017 7 26
    イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    継続期間: 2017 6 182017 6 22

    Other

    Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Taiwan, Province of China
    Kaohsiung
    期間17/6/1817/6/22

    Fingerprint

    Acoustic resonators
    Quartz
    Resonators
    quartz
    resonators
    shear
    broadband
    Thin films
    Viscosity of liquids
    acoustics
    Sensors
    Viscoelasticity
    Acoustic wave velocity
    thin films
    Glycerol
    viscosity
    harmonics
    Natural frequencies
    sweep frequency
    sensors

    ASJC Scopus subject areas

    • Chemical Health and Safety
    • Instrumentation
    • Electrical and Electronic Engineering

    これを引用

    Yamakawa, Y., Sano, K., Karasawa, R., & Yanagitani, T. (2017). Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2135-2138). [7994497] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994497

    Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. / Yamakawa, Y.; Sano, K.; Karasawa, R.; Yanagitani, Takahiko.

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 2135-2138 7994497.

    研究成果: Conference contribution

    Yamakawa, Y, Sano, K, Karasawa, R & Yanagitani, T 2017, Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994497, Institute of Electrical and Electronics Engineers Inc., pp. 2135-2138, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 17/6/18. https://doi.org/10.1109/TRANSDUCERS.2017.7994497
    Yamakawa Y, Sano K, Karasawa R, Yanagitani T. Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 2135-2138. 7994497 https://doi.org/10.1109/TRANSDUCERS.2017.7994497
    Yamakawa, Y. ; Sano, K. ; Karasawa, R. ; Yanagitani, Takahiko. / Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 2135-2138
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    abstract = "In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.",
    keywords = "AT-cut quartz crystal, Glycerine, HBAR, ScAlN film, Viscosity sensor",
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    AU - Yamakawa, Y.

    AU - Sano, K.

    AU - Karasawa, R.

    AU - Yanagitani, Takahiko

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    N2 - In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

    AB - In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

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