Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

Y. Yamakawa, K. Sano, R. Karasawa, Takahiko Yanagitani

    研究成果: Conference contribution

    抜粋

    In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

    元の言語English
    ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    出版者Institute of Electrical and Electronics Engineers Inc.
    ページ2135-2138
    ページ数4
    ISBN(電子版)9781538627310
    DOI
    出版物ステータスPublished - 2017 7 26
    イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    継続期間: 2017 6 182017 6 22

    Other

    Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Taiwan, Province of China
    Kaohsiung
    期間17/6/1817/6/22

      フィンガープリント

    ASJC Scopus subject areas

    • Chemical Health and Safety
    • Instrumentation
    • Electrical and Electronic Engineering

    これを引用

    Yamakawa, Y., Sano, K., Karasawa, R., & Yanagitani, T. (2017). Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2135-2138). [7994497] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994497