C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Yuta Nakahigashi*, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

本文言語English
ホスト出版物のタイトル2011 IEEE International Ultrasonics Symposium, IUS 2011
ページ810-813
ページ数4
DOI
出版ステータスPublished - 2011 12月 1
外部発表はい
イベント2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States
継続期間: 2011 10月 182011 10月 21

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2011 IEEE International Ultrasonics Symposium, IUS 2011
国/地域United States
CityOrlando, FL
Period11/10/1811/10/21

ASJC Scopus subject areas

  • 音響学および超音波学

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