C-Axis Tilted ScAIN Film Shear Mode Resonators for Biosensing

Hana Yazaki, Takumi Soutome, Rei Karasawa, Shinji Takayanagi, Kenji Yoshida, Takahiko Yanagitani

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Miniature and highly sensitive biosensors are attractive. Quasi-shear mode c-axis tilted ScAIN film resonator is suitable for sensing biomolecules because they can operate in requid. Higher k'152 value of ScAIN films makes it possible to improve signal to noise ratio. In this study, the streptavidin-biotin interactions were monitored by using the c-axis tilted ScAlN film quasi-shear mode resonators.

本文言語English
ホスト出版物のタイトル2018 IEEE International Ultrasonics Symposium, IUS 2018
出版社IEEE Computer Society
ISBN(電子版)9781538634257
DOI
出版ステータスPublished - 2018 12 17
イベント2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
継続期間: 2018 10 222018 10 25

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2018-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
国/地域Japan
CityKobe
Period18/10/2218/10/25

ASJC Scopus subject areas

  • 音響学および超音波学

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