C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

Rei Karasawa, Takahiko Yanagitani

研究成果: Conference contribution

7 被引用数 (Scopus)

抄録

Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.

本文言語English
ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
出版社IEEE Computer Society
ISBN(電子版)9781538633830
DOI
出版ステータスPublished - 2017 10 31
イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
継続期間: 2017 9 62017 9 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
国/地域United States
CityWashington
Period17/9/617/9/9

ASJC Scopus subject areas

  • 音響学および超音波学

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