Carbon nanotube forests as top electrode in electroacoustic resonators

Santiago Esconjauregui, Taron Makaryan, Teona Mirea, Mario DeMiguel-Ramos, Jimena Olivares, Yuzheng Guo, Hisashi Sugime, Lorenzo D'Arsié, Junwei Yang, Sunil Bhardwaj, Cinzia Cepek, John Robertson, Enrique Iborra

研究成果: Article査読

5 被引用数 (Scopus)

抄録

We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.

本文言語English
論文番号133106
ジャーナルApplied Physics Letters
107
13
DOI
出版ステータスPublished - 2015 9 28
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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