Cavity-free micro thermoelectric energy harvester with Si nanowires

T. Watanabe, M. Tomita, T. Zhan, K. Shima, Y. Himeda, R. Yamato, T. Matsukawa, T. Matsuki

研究成果: Conference contribution

抄録

We present a new design of silicon-based micro-thermoelectric generator, which utilizes silicon nanowires as the thermoelectric leg. It is driven by a steep temperature gradient exuding around a heat flow perpendicular to the substrate, and the silicon nanowires are not suspended on a cavity etched on the substrate. The power density is scalable by shortening the silicon nanowire to sub-μm length, which was experimentally demonstrated and tens of µW/cm2-class power generation was achieved at an externally applied temperature difference of only 5 K. A numerical discussion shows that the thermoelectric power can be drastically enhanced by suppressing the thermal resistance at the entire substrate. Thus, there is a plenty of room at the micro- or submicrometric scales for realizing thermal energy harvesting devices with high power densities.

本文言語English
ホスト出版物のタイトルSilicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9
編集者F. Roozeboom, P. J. Timans, K. Kakushima, E. P. Gusev, Z. Karim, D. Misra, Y. S. Obeng, S. De Gendt, H. Jagannathan
出版社Electrochemical Society Inc.
ページ95-110
ページ数16
3
ISBN(電子版)9781607688662, 9781607688686, 9781607688686, 9781607688693, 9781607688709, 9781607688716, 9781607688723
DOI
出版ステータスPublished - 2019
イベントInternational Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting - Dallas, United States
継続期間: 2019 5 262019 5 30

出版物シリーズ

名前ECS Transactions
番号3
89
ISSN(印刷版)1938-6737
ISSN(電子版)1938-5862

Conference

ConferenceInternational Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting
国/地域United States
CityDallas
Period19/5/2619/5/30

ASJC Scopus subject areas

  • 工学(全般)

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