Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

Takahiko Yanagitani*, Takuya Nohara, Mami Matsukawa, Yoshiaki Watanabe, Takahiko Otani

*この研究の対応する著者

研究成果: Article査読

27 被引用数 (Scopus)

抄録

This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unldirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi;-scan pole figure analysis, ω-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.

本文言語English
ページ(範囲)2140-2145
ページ数6
ジャーナルIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
52
11
DOI
出版ステータスPublished - 2005 11月
外部発表はい

ASJC Scopus subject areas

  • 器械工学
  • 音響学および超音波学
  • 電子工学および電気工学

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