This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unldirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi;-scan pole figure analysis, ω-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.
|ジャーナル||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|出版ステータス||Published - 2005 11月|
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