Characteristics of residual gases in an extreme-high vacuum system

K. Kokubun*, H. Shimizu, S. Ichimura

*この研究の対応する著者

研究成果: Article査読

抄録

Residual gases in an extreme-high vacuum (XHV) system are measured at each pumping step. On the basis of the analysis, the pumping capacity of each vacuum pump is estimated. As a result, it is found that, in the case of a liquid N2-cooled shroud, the titanium-sublimation pump has a high capacity for evacuating of Ch4 and Ar as well as H2 gas, and a pumping system which consists of two turbo molecular pumps and a rotary pump has a pumping capacity for almost all gases in the region of ultra high vacuum, but loses the capacity for H2 gas in the XHV region.

本文言語English
ページ(範囲)38-44
ページ数7
ジャーナルDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
57
4
出版ステータスPublished - 1993 1 1
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 電子工学および電気工学

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