This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated.
|ホスト出版物のタイトル||TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems|
|出版ステータス||Published - 2009|
|イベント||TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO|
継続期間: 2009 6 21 → 2009 6 25
|Other||TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems|
|Period||09/6/21 → 09/6/25|
ASJC Scopus subject areas