Characterization of n-type layer by S + ion implantation in 4H-SiC

Y. Tanaka, Naoto Kobayashi, H. Okumura, S. Yoshida, M. Hasegawa, M. Ogura, H. Tanoue

研究成果: Conference contribution


We investigated the optical, electrical and structural properties of the layer which was implanted with sulfur ion(S +) in 4H-SiC. By using the high temperature ion implantation technique more less residual defects were observed compared with the room temperature ion implantation by Rutherford backscattering spectrometry and channeling(RBS-channeling). After annealing at 1700°C there was no significant difference between the implanted sample and virgin sample in crystallinity within the detection limit of RBS-channeling. From the result of low temperature photoluminescence(LTPL) we could see the photoluminescences, so-called D 1 and D 2 center, originating in the defects formed by ion implantation and post-annealing(∼1700°C) processes and confirmed that their intensities decreased with the increasing of the total dose of S +. The result of Hall effect measurement suggested that the conduction type of S +-implanted layer is n-type and their activation energies were 275meV and 410meV by the fitting of neutrality equation assuming the two activation energies for the hexagonal and cubic lattice sites in 4H-SiC.

ホスト出版物のタイトルMaterials Research Society Symposium - Proceedings
編集者R.J. Shul, F. Ren, W. Pletschen, M. Murakami
出版物ステータスPublished - 2000
イベントWide-Bandgap Electronic Devices - San Francisco, CA, United States
継続期間: 2000 4 242000 4 27


OtherWide-Bandgap Electronic Devices
United States
San Francisco, CA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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  • これを引用

    Tanaka, Y., Kobayashi, N., Okumura, H., Yoshida, S., Hasegawa, M., Ogura, M., & Tanoue, H. (2000). Characterization of n-type layer by S + ion implantation in 4H-SiC : R. J. Shul, F. Ren, W. Pletschen, & M. Murakami (版), Materials Research Society Symposium - Proceedings (巻 622)