Compact EUV source based on laser compton scattering between micro-bunch electron beam and CO₂ laser pulse

Physics & Astronomy

• electron beams 100%
• scattering 71%
• pulses 69%
• lasers 61%
• extreme ultraviolet radiation 40%
• photocathodes 31%
• inoculation 31%
• high power lasers 26%
• lithography 23%
• direct current 21%
• harmonics 19%
• modulation 18%
• wavelengths 13%