Compact helical delay lines embedded in a silicon

Tamotsu Nishino, Moriyasu Miyazaki, Sang Seok Lee, Yukihisa Yoshida, Yoshiyuki Suehiro, Tatsuya Fukami, Tadashi Takagi

研究成果: Conference contribution

抄録

Small size quasi-lumped-element helical delay lines are presented. The device is disposed in a dielectric-air-metal (DAM) cavity, which consists of a SiNx membrane above a 30-μm-deep hollow cavity made by silicon micromachining process. The delay line is composed of fine segments of a one-turn inductor and a tiny shunt capacitor whose electrode slips into under the ground pattern. The fineness of the segments realizes linear frequency responses up to more than 40GHz, and the optimal LC values of the segment drastically reduce the wavelength. The compact delay line is useful to reduce the size of microwave components such as phase shifters or feedback amplifiers. The 7-turn, 12-turn and 17-turn helical delay lines were fabricated. The 12-turn delay line showed 450°-delay for 1050-μm-long line with 2.5-dB loss at 30 GHz.

本文言語English
ホスト出版物のタイトルConference Proceedings- 34th European Microwave Conference
ページ613-616
ページ数4
出版ステータスPublished - 2004
外部発表はい
イベントConference Proceedings- 34th European Microwave Conference - London, United Kingdom
継続期間: 2004 10月 122004 10月 14

出版物シリーズ

名前Conference Proceedings- European Microwave Conference
2

Conference

ConferenceConference Proceedings- 34th European Microwave Conference
国/地域United Kingdom
CityLondon
Period04/10/1204/10/14

ASJC Scopus subject areas

  • 工学(全般)

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