Comparison of the kt2Extraction Methods of Piezoelectric Films in Film/Substrate Structure and Self-Standing Film Structure

Yuki Shimizu, Keita Kondo, Takahiko Yanagitani

研究成果: Conference article査読

抄録

Electromechanical coupling coefficient kt2 of piezoelectric layer strongly affects the performance of BAW devices. The resonance-antiresonance method, which is standard for kt2 evaluation, requires self-standing film structure (FBAR). On the other hand, the conversion loss (CL) makes it possible to estimate the kt2 value from film/substrate structure (HBAR). Last year, we proposed new CL methods using electromagnetic signal or acoustic loss subtraction to eliminate the underestimation in the conventional CL method. In this study, we compared conventional and new CL methods with resonance-antiresonance method at the same point on the same ScAlN films. As a result, extracted kt2 values of new CL methods agree well with the that of resonance-antiresonance method.

本文言語English
ジャーナルIEEE International Ultrasonics Symposium, IUS
DOI
出版ステータスPublished - 2021
イベント2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
継続期間: 2011 9月 112011 9月 16

ASJC Scopus subject areas

  • 音響学および超音波学

フィンガープリント

「Comparison of the kt2Extraction Methods of Piezoelectric Films in Film/Substrate Structure and Self-Standing Film Structure」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル