Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for syntheses of Si3N4, SiC and AlN

Akio Fuwa*, Yutaka Shimizu, Toshiyasu Ohasi, Tadashi Kobayashi

*この研究の対応する著者

    研究成果査読

    2 被引用数 (Scopus)

    抄録

    Using the SOLGAS-MIX computer program and the JANAF thermochemical data, the equilibrium phase diagrams of Si-N-Cl-H, Si-C-Cl-H and Al-N-Cl-H systems at 1473 K and 1 atmosphere have been constructed for syntheses of Si3N4, SiC and AlN. Based on these phase diagrams, the selection and the combination of the gaseous reactant chemicals have been discussed as well as the synthesis yields and total free energy change in these syntheses formation reactions. Desirable condition for these compound syntheses could be shown under equilibrium condition by the computer calculation using these phase diagram and the thermochemical data.

    本文言語English
    ページ(範囲)62-76
    ページ数15
    ジャーナルMetallurgical Review of MMIJ (Mining and Metallurgical Institute of Japan)
    6
    1
    出版ステータスPublished - 1989 4

    ASJC Scopus subject areas

    • 金属および合金

    フィンガープリント

    「Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for syntheses of Si<sub>3</sub>N<sub>4</sub>, SiC and AlN」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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