Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for synthesis of Si3N4, SiC and AIN

Akio Fuwa*, Yutaka Shimizu, Toshiyasu Ohasi, Tadashi Kobayashi

*この研究の対応する著者

    研究成果: Article査読

    抄録

    Using the SOLGAS-MIX computer program and JANAF thermochemical data, the equilibrium phase diagrams of Si-N-Cl-H, Si-C-Cl-H and Al-N-Cl-H systems at 1473 K and 1 atmosphere have been constructed for synthesis of Si3N4, SiC and AlN. Based on these phase diagrams, selection and combination of gaseous reactant chemicals are discussed with respect to the synthesis yields and total free energy change in the formation reactions. Desirable conditions for synthesis are shown under equilibrium conditions.

    本文言語English
    ページ(範囲)195-200
    ページ数6
    ジャーナルShigen to sozai
    105
    2
    出版ステータスPublished - 1989 2

    ASJC Scopus subject areas

    • 工学(全般)

    フィンガープリント

    「Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for synthesis of Si<sub>3</sub>N<sub>4</sub>, SiC and AIN」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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