Construction of membrane sieves using stoichiometric and stress-reduced Si ₃N ₄/SiO ₂/Si ₃N ₄ multilayer films and their applications in blood plasma separation

Dae Sik Lee^*, Yo Han Choi, Yong Duk Han, Hyun C. Yoon, Shuichi Shoji, Mun Youn Jung

^*この研究の対応する著者

基幹理工学部

研究成果: Article › 査読

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Construction of membrane sieves using stoichiometric and stress-reduced Si ₃N ₄/SiO ₂/Si ₃N ₄ multilayer films and their applications in blood plasma separation

フィンガープリント

Engineering & Materials Science

Chemical Compounds

Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation

フィンガープリント

Engineering & Materials Science

Chemical Compounds

Construction of membrane sieves using stoichiometric and stress-reduced Si ₃N ₄/SiO ₂/Si ₃N ₄ multilayer films and their applications in blood plasma separation