Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

D. H. Yoon*, T. Sekiguchi, J. S. Go, S. Shoji

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.

本文言語English
ホスト出版物のタイトル2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
ページ1025-1028
ページ数4
DOI
出版ステータスPublished - 2012 5月 7
イベント2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
継続期間: 2012 1月 292012 2月 2

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国/地域France
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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