Control of refractive index of fluorinated polyimide by proton beam irradiation

Yukitaka Arai, Yoshimichi Ohki, Keisuke Saito, Hiroyuki Nishikawa

    研究成果: Article

    2 引用 (Scopus)

    抄録

    To clarify the feasibility of controlling the refractive index of a polymer by proton beam irradiation, we irradiated 1.0 MeV protons to a fluorinated polyimide film. Before and after the proton irradiation at a fluence between 1 × 1014 and 7 × 1016 cm-2, the film surface was scanned by a profilometer. It was found that the depth of a dent, which increases with fluence, was induced by the irradiation. The refractive index of the ionirradiated region was calculated using the Lorentz-Lorenz equation, substituting the depth of the dent and the projected range of the protons. When the fluorinated polyimide was irradiated at a fluence of 7 × 1016 cm-2, the refractive index increased by about 3.3%, which agrees with the increment in refractive index measured by spectroscopic ellipsometry. The increment in refractive index (0.21%) induced by the irradiation of protons at the fluence of 1 × 1015 cm -2 is comparable to the value (0.35%) observed when protons were irradiated to SiO2 glass at a similar fluence. Therefore, it is reasonable to assume that the ion irradiation to a polymer can be a good method for fabricating a high-performance polymer-based optical waveguide.

    元の言語English
    記事番号012601
    ジャーナルJapanese Journal of Applied Physics
    52
    発行部数1
    DOI
    出版物ステータスPublished - 2013 1

    Fingerprint

    Proton beams
    proton beams
    polyimides
    Polyimides
    Refractive index
    fluence
    Irradiation
    refractivity
    Protons
    irradiation
    protons
    polymers
    Polymers
    Proton irradiation
    profilometers
    proton irradiation
    Spectroscopic ellipsometry
    Optical waveguides
    Ion bombardment
    ion irradiation

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

    これを引用

    Control of refractive index of fluorinated polyimide by proton beam irradiation. / Arai, Yukitaka; Ohki, Yoshimichi; Saito, Keisuke; Nishikawa, Hiroyuki.

    :: Japanese Journal of Applied Physics, 巻 52, 番号 1, 012601, 01.2013.

    研究成果: Article

    Arai, Yukitaka ; Ohki, Yoshimichi ; Saito, Keisuke ; Nishikawa, Hiroyuki. / Control of refractive index of fluorinated polyimide by proton beam irradiation. :: Japanese Journal of Applied Physics. 2013 ; 巻 52, 番号 1.
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