The control of the coupling properties of a directional coupler formed in a planar lightwave circuit by proton irradiation was examined. Irradiation of the cladding between the two cores that constitute the coupling portion causes an increase in the coupling coefficient, whereas subsequent irradiation of the entire coupling portion decreases the coupling coefficient. The change in the coupling coefficient results in changes to the coupling ratios, which depend on the irradiated area and fluence. By adjusting these, the desired coupling property can be obtained. This method can be applied in rectifying fabrication errors in any kind of optical device formed in a planar lightwave circuit.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2007 11 1|
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