Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Takuya Nohara, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

研究成果: Article

6 引用 (Scopus)

抜粋

Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S11 analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.

元の言語English
ページ(範囲)4201-4203
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
発行部数5 A
DOI
出版物ステータスPublished - 2006 5 9
外部発表Yes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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