Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S11 analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版物ステータス||Published - 2006 5 9|
ASJC Scopus subject areas
- Physics and Astronomy(all)