Coverage and properties of a-SiNx hard disk overcoat

Bing K. Yen; Richard L. White; Robert J. Waltman; C. Mathew Mate; Yoshiaki Sonobe; Bruno Marchon

doi:10.1063/1.1543136

Coverage and properties of a-SiN_x hard disk overcoat

Bing K. Yen^*, Richard L. White, Robert J. Waltman, C. Mathew Mate, Yoshiaki Sonobe, Bruno Marchon

^*この研究の対応する著者

研究成果: Article › 査読

44 被引用数 (Scopus)

抄録

The study of coverage and properties of amorphous silicon nitride (a-SiN_x) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiN_x disk overcoat may be attributed to its high hardness and dense structure.

本文言語	English
ページ（範囲）	8704-8706
ページ数	3
ジャーナル	Journal of Applied Physics
巻	93
号	10 3
DOI	https://doi.org/10.1063/1.1543136
出版ステータス	Published - 2003 5月 15
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（全般）

文献へのアクセス

10.1063/1.1543136

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引用スタイル

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AU - Marchon, Bruno

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