In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.
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