Crystallinity and strength of diamond bombarded with low energy ion beams

Iwao Miyamoto*, Kazuhito Nishimura, Kozo Kawata, Hiroshi Kawarada, Shoichi Shimada

*この研究の対応する著者

研究成果: Article査読

9 被引用数 (Scopus)

抄録

In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

本文言語English
ページ(範囲)689-691
ページ数3
ジャーナルNuclear Inst. and Methods in Physics Research, B
39
1-4
DOI
出版ステータスPublished - 1989 3月 2
外部発表はい

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学

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