Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno*, Sharon Farrens, Hiroyuki Ishida, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Shuichi Shoji

*この研究の対応する著者

研究成果: Conference contribution

13 被引用数 (Scopus)

抄録

Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

本文言語English
ホスト出版物のタイトルProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
ページ346-349
ページ数4
DOI
出版ステータスPublished - 2005 12 1
イベント2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada
継続期間: 2006 7 242006 7 27

出版物シリーズ

名前Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Conference

Conference2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
国/地域Canada
CityBanff, Alberta
Period06/7/2406/7/27

ASJC Scopus subject areas

  • 工学(全般)

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