Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno, Sharon Farrens, Hiroyuki Ishida, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Shuichi Shoji

研究成果: Conference contribution

10 引用 (Scopus)

抜粋

Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

元の言語English
ホスト出版物のタイトルProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
ページ346-349
ページ数4
DOI
出版物ステータスPublished - 2005
イベント2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta
継続期間: 2006 7 242006 7 27

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Banff, Alberta
期間06/7/2406/7/27

    フィンガープリント

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Mizuno, J., Farrens, S., Ishida, H., Dragoi, V., Shinohara, H., Suzuki, T., Ishizuka, M., Glinsner, T., & Shoji, S. (2005). Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. : Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 346-349). [1540849] https://doi.org/10.1109/ICMENS.2005.37