抄録
ZnTe electro-optic waveguide device has a great potential for the practical applications. The introduction of low Mg% cladding layer to the ZnMgTe/ZnTe/ZnMgTe waveguide structure was performed to circumvent the effect of large lattice mismatch between ZnMgTe and ZnTe, and to improve the crystallographic properties. Various two-step index ZnTe waveguide structures were fabricated by molecular beam epitaxy. The structure with 0.1 μm (Mg 9%) interlayer and 0.6 μm (Mg 26%) cladding layer showed significant defect density reduction compared to the single-step index ZnTe waveguide (Mg 20%) due the much smaller lattice mismatch between the ZnTe core layer and the ZnMgTe interlayer. However, the average Mg content of ZnMgTe layers needs to be carefully controlled to prevent the drop of the optical confinement.
| 元の言語 | English |
|---|---|
| 記事番号 | 04F104 |
| ジャーナル | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| 巻 | 35 |
| 発行部数 | 4 |
| DOI | |
| 出版物ステータス | Published - 2017 7 1 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry
- Electrical and Electronic Engineering
これを引用
Defect density reduction in core layer of ZnTe electro-optical waveguide by low lattice mismatched interfaces. / Sun, Wei Che; Nakasu, Taizo; Odaka, Keisuke; Kobayashi, Masakazu; Asahi, Toshiaki.
：: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 巻 35, 番号 4, 04F104, 01.07.2017.研究成果: Article
}
TY - JOUR
T1 - Defect density reduction in core layer of ZnTe electro-optical waveguide by low lattice mismatched interfaces
AU - Sun, Wei Che
AU - Nakasu, Taizo
AU - Odaka, Keisuke
AU - Kobayashi, Masakazu
AU - Asahi, Toshiaki
PY - 2017/7/1
Y1 - 2017/7/1
N2 - ZnTe electro-optic waveguide device has a great potential for the practical applications. The introduction of low Mg% cladding layer to the ZnMgTe/ZnTe/ZnMgTe waveguide structure was performed to circumvent the effect of large lattice mismatch between ZnMgTe and ZnTe, and to improve the crystallographic properties. Various two-step index ZnTe waveguide structures were fabricated by molecular beam epitaxy. The structure with 0.1 μm (Mg 9%) interlayer and 0.6 μm (Mg 26%) cladding layer showed significant defect density reduction compared to the single-step index ZnTe waveguide (Mg 20%) due the much smaller lattice mismatch between the ZnTe core layer and the ZnMgTe interlayer. However, the average Mg content of ZnMgTe layers needs to be carefully controlled to prevent the drop of the optical confinement.
AB - ZnTe electro-optic waveguide device has a great potential for the practical applications. The introduction of low Mg% cladding layer to the ZnMgTe/ZnTe/ZnMgTe waveguide structure was performed to circumvent the effect of large lattice mismatch between ZnMgTe and ZnTe, and to improve the crystallographic properties. Various two-step index ZnTe waveguide structures were fabricated by molecular beam epitaxy. The structure with 0.1 μm (Mg 9%) interlayer and 0.6 μm (Mg 26%) cladding layer showed significant defect density reduction compared to the single-step index ZnTe waveguide (Mg 20%) due the much smaller lattice mismatch between the ZnTe core layer and the ZnMgTe interlayer. However, the average Mg content of ZnMgTe layers needs to be carefully controlled to prevent the drop of the optical confinement.
UR - http://www.scopus.com/inward/record.url?scp=85020417874&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85020417874&partnerID=8YFLogxK
U2 - 10.1116/1.4984962
DO - 10.1116/1.4984962
M3 - Article
AN - SCOPUS:85020417874
VL - 35
JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SN - 2166-2746
IS - 4
M1 - 04F104
ER -