Densification of glassy carbon by fluorine ion implantation

Engineering & Materials Science

• Glassy carbon 100%
• Fluorine 79%
• Ion implantation 78%
• Densification 65%
• Secondary ion mass spectrometry 57%
• Atomic force microscopy 49%
• Ions 35%
• Amorphous carbon 29%
• Raman scattering 27%
• Raman spectroscopy 25%
• Surface morphology 21%
• Atoms 19%
• Chemical analysis 12%
• Temperature 7%

Physics & Astronomy

• glassy carbon 83%
• fluorine 57%
• densification 57%
• ion implantation 53%
• fluence 48%
• secondary ion mass spectrometry 39%
• surface layers 33%
• atomic force microscopy 29%
• shift 23%
• normal density functions 19%
• ions 17%
• Raman spectroscopy 16%
• Raman spectra 14%
• carbon 12%
• dosage 12%
• room temperature 10%
• profiles 10%
• atoms 9%
• energy 5%

Chemical Compounds

• Ion Implantation 70%
• Densification 63%
• Fluorine Atom 50%
• Secondary Ion Mass Spectroscopy 31%
• Carbon Atom 27%
• Atomic Force Microscopy 22%
• Surface 18%
• Raman Spectrum 11%
• Ion 11%
• Dose 11%
• Raman Spectroscopy 10%
• Amorphous Material 9%
• Modification 8%
• Ambient Reaction Temperature 8%
• Energy 6%