Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

S. Karimoto, H. Sato, H. Shibata, T. Makimoto

研究成果: Article査読

2 被引用数 (Scopus)

抄録

We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

本文言語English
ページ(範囲)927-929
ページ数3
ジャーナルPhysica C: Superconductivity and its applications
463-465
SUPPL.
DOI
出版ステータスPublished - 2007 10 1
外部発表はい

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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