Deposition of TiO2 photocatalyst on polyethylene terephthalate or polyimide polymer films by reactive sputtering for flexible photocatalytic sheets

Yuka Kitazawa, Junjun Jia, Shin Ichi Nakamura, Yuzo Shigesato

研究成果: Article

抄録

Polycrystalline anatase TiO2 films were deposited by rf reactive magnetron sputtering on polyethylene terephthalate (PET) or polyimide (PI) films with different buffer layers, such as SiO2 or Zn2SnO x (ZTO), between the TiO2 film and the substrate. Such TiO2/(SiO2 or ZTO)/(PET or PI) sheets with high transmittance in the visible region of light showed high photo-decomposition ability towards CH3CHO under UV irradiation by a black light centered at 352 nm. When SiO2 was used as the buffer layer, a "nano-pore layer" was observed clearly over the full area of the polymer substrate close to the buffer layer after UV irradiation, whereas such degradation was suppressed drastically when ZTO was used as the buffer layer. Such photocatalytic sheets also demonstrated photo-induced hydrophilicity upon UV irradiation, with the contact angle to pure water becoming around 5° under UV irradiation. After additional deposition of SiO2 on the outermost surface of the TiO2 films by reactive sputtering under rather a high total gas pressure of 3.0 Pa, the photo-induced hydrophilicity was maintained for more than 98 days in the dark. Such three-layered SiO2/TiO2/ZTO films on PET or PI substrates could be promising flexible photocatalytic sheets that retain photo-induced hydrophilicity.

元の言語English
記事番号055503
ジャーナルJapanese journal of applied physics
58
発行部数5
DOI
出版物ステータスPublished - 2019 1 1

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Reactive sputtering
polyethylene terephthalate
Photocatalysts
polyimides
Polymer films
Polyimides
Polyethylene terephthalates
Buffer layers
sputtering
Hydrophilicity
buffers
Irradiation
polymers
irradiation
Substrates
photodecomposition
anatase
Magnetron sputtering
Titanium dioxide
Contact angle

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

@article{58f131d0fda0439e870dd3e397358fd7,
title = "Deposition of TiO2 photocatalyst on polyethylene terephthalate or polyimide polymer films by reactive sputtering for flexible photocatalytic sheets",
abstract = "Polycrystalline anatase TiO2 films were deposited by rf reactive magnetron sputtering on polyethylene terephthalate (PET) or polyimide (PI) films with different buffer layers, such as SiO2 or Zn2SnO x (ZTO), between the TiO2 film and the substrate. Such TiO2/(SiO2 or ZTO)/(PET or PI) sheets with high transmittance in the visible region of light showed high photo-decomposition ability towards CH3CHO under UV irradiation by a black light centered at 352 nm. When SiO2 was used as the buffer layer, a {"}nano-pore layer{"} was observed clearly over the full area of the polymer substrate close to the buffer layer after UV irradiation, whereas such degradation was suppressed drastically when ZTO was used as the buffer layer. Such photocatalytic sheets also demonstrated photo-induced hydrophilicity upon UV irradiation, with the contact angle to pure water becoming around 5° under UV irradiation. After additional deposition of SiO2 on the outermost surface of the TiO2 films by reactive sputtering under rather a high total gas pressure of 3.0 Pa, the photo-induced hydrophilicity was maintained for more than 98 days in the dark. Such three-layered SiO2/TiO2/ZTO films on PET or PI substrates could be promising flexible photocatalytic sheets that retain photo-induced hydrophilicity.",
author = "Yuka Kitazawa and Junjun Jia and Nakamura, {Shin Ichi} and Yuzo Shigesato",
year = "2019",
month = "1",
day = "1",
doi = "10.7567/1347-4065/ab0517",
language = "English",
volume = "58",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "5",

}

TY - JOUR

T1 - Deposition of TiO2 photocatalyst on polyethylene terephthalate or polyimide polymer films by reactive sputtering for flexible photocatalytic sheets

AU - Kitazawa, Yuka

AU - Jia, Junjun

AU - Nakamura, Shin Ichi

AU - Shigesato, Yuzo

PY - 2019/1/1

Y1 - 2019/1/1

N2 - Polycrystalline anatase TiO2 films were deposited by rf reactive magnetron sputtering on polyethylene terephthalate (PET) or polyimide (PI) films with different buffer layers, such as SiO2 or Zn2SnO x (ZTO), between the TiO2 film and the substrate. Such TiO2/(SiO2 or ZTO)/(PET or PI) sheets with high transmittance in the visible region of light showed high photo-decomposition ability towards CH3CHO under UV irradiation by a black light centered at 352 nm. When SiO2 was used as the buffer layer, a "nano-pore layer" was observed clearly over the full area of the polymer substrate close to the buffer layer after UV irradiation, whereas such degradation was suppressed drastically when ZTO was used as the buffer layer. Such photocatalytic sheets also demonstrated photo-induced hydrophilicity upon UV irradiation, with the contact angle to pure water becoming around 5° under UV irradiation. After additional deposition of SiO2 on the outermost surface of the TiO2 films by reactive sputtering under rather a high total gas pressure of 3.0 Pa, the photo-induced hydrophilicity was maintained for more than 98 days in the dark. Such three-layered SiO2/TiO2/ZTO films on PET or PI substrates could be promising flexible photocatalytic sheets that retain photo-induced hydrophilicity.

AB - Polycrystalline anatase TiO2 films were deposited by rf reactive magnetron sputtering on polyethylene terephthalate (PET) or polyimide (PI) films with different buffer layers, such as SiO2 or Zn2SnO x (ZTO), between the TiO2 film and the substrate. Such TiO2/(SiO2 or ZTO)/(PET or PI) sheets with high transmittance in the visible region of light showed high photo-decomposition ability towards CH3CHO under UV irradiation by a black light centered at 352 nm. When SiO2 was used as the buffer layer, a "nano-pore layer" was observed clearly over the full area of the polymer substrate close to the buffer layer after UV irradiation, whereas such degradation was suppressed drastically when ZTO was used as the buffer layer. Such photocatalytic sheets also demonstrated photo-induced hydrophilicity upon UV irradiation, with the contact angle to pure water becoming around 5° under UV irradiation. After additional deposition of SiO2 on the outermost surface of the TiO2 films by reactive sputtering under rather a high total gas pressure of 3.0 Pa, the photo-induced hydrophilicity was maintained for more than 98 days in the dark. Such three-layered SiO2/TiO2/ZTO films on PET or PI substrates could be promising flexible photocatalytic sheets that retain photo-induced hydrophilicity.

UR - http://www.scopus.com/inward/record.url?scp=85067793534&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85067793534&partnerID=8YFLogxK

U2 - 10.7567/1347-4065/ab0517

DO - 10.7567/1347-4065/ab0517

M3 - Article

VL - 58

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5

M1 - 055503

ER -