Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly

M. Ishizuka, M. Abe, H. Houjou, S. Shoji, J. Mizuno, K. Tsutsui, Y. Wada

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページ999-1002
ページ数4
ISBN(電子版)0780377311, 9780780377318
DOI
出版ステータスPublished - 2003 1月 1
イベント12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
継続期間: 2003 6月 82003 6月 12

出版物シリーズ

名前TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
国/地域United States
CityBoston
Period03/6/803/6/12

ASJC Scopus subject areas

  • 電子工学および電気工学

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