Desktop type equipment of thermal-assisted UV roller imprinting

Tomotaka Shibazaki*, Hidetoshi Shinohara, Tamano Hirasawa, Nobuji Sakai, Jun Taniguchi, Jun Mizuno, Shuichi Shoji

*この研究の対応する著者

研究成果: Article査読

11 被引用数 (Scopus)

抄録

Desktop type equipment of thermal-assisted UV roller imprinting was developed. A remarkable advantage of the desktop type equipment is expected to be easy evaluation of replication results using different molds with small amounts of resin. Replication tests were carried out under various Scanning speed of the stage, UV intensity, and roll temperature. Pattern replication was improved by heating roll under the same scanning speed of stage. Heating of the roll was effective to realize better pattern replication under the same scanning speed of the stage.

本文言語English
ページ(範囲)727-730
ページ数4
ジャーナルJournal of Photopolymer Science and Technology
22
6
DOI
出版ステータスPublished - 2010 1月

ASJC Scopus subject areas

  • ポリマーおよびプラスチック
  • 有機化学
  • 材料化学

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