Detection and characterization of trace element contamination on silicon wafers

Physics & Astronomy

• trace elements 100%
• contamination 67%
• wafers 56%
• characterization 41%
• silicon 40%
• metals 38%
• x ray fluorescence 29%
• integrated circuits 20%
• synchrotron radiation 19%
• etching 16%
• atoms 10%
• industries 9%
• transition metals 8%
• transistors 8%
• copper 7%
• oxygen 6%
• sensitivity 6%
• water 6%