Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

Dong Hyun Yoon*, Hironobu Sato, Asahi Nakahara, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Shoji

*この研究の対応する著者

研究成果: Article査読

6 被引用数 (Scopus)

抄録

An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

本文言語English
論文番号095003
ジャーナルJournal of Micromechanics and Microengineering
24
9
DOI
出版ステータスPublished - 2014 9月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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