Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation

Takefumi Kamioka*, Kou Sato, Yutaka Kazama, Takanobu Watanabe, Iwao Ohdomari

*この研究の対応する著者

研究成果: Article査読

1 被引用数 (Scopus)

抄録

An ion beam alignment system has been developed in order to realize real-time scanning tunneling microscope (STM) observation of "dopant-ion" irradiation that has been difficult due to the low emission intensity of the liquid-metal-ion-source (LMIS) containing dopant atoms. The alignment system is installed in our original ion gun and STM combined system (IG/STM) which is used for in situ STM observation during ion irradiation. By using an absorbed electron image unit and a dummy sample, ion beam alignment operation is drastically simplified and accurized. We demonstrate that sequential STM images during phosphorus-ion irradiation are successfully obtained for sample surfaces of Si(111) -7 × 7 at room temperature and a high temperature of 500 °C. The LMIS-IG/STM equipped with the developed ion beam alignment system would be a powerful tool for microscopic investigation of the dynamic processes of ion irradiation.

本文言語English
論文番号073707
ジャーナルReview of Scientific Instruments
79
7
DOI
出版ステータスPublished - 2008

ASJC Scopus subject areas

  • 器械工学

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