Development of compact coherent EUV source based on laser Compton scattering

S. Kashiwagi, R. Kato, G. Isoyama, Kazuyuki Sakaue, A. Masuda, T. Nomoto, T. Gowa, Masakazu Washio, R. Kuroda, J. Urakawa

研究成果: Article

3 引用 (Scopus)

抄録

High-power extreme ultra-violet (EUV) sources are required for next generation semiconductor lithography. We start to develop a compact EUV source in the spectral range 13-14 nm, which is based on a laser Compton scattering between a 7 MeV micro-bucnhed electron beam and a high-intensity CO2 laser pulse. The electron beam extracted from a DC photocathode gun is micro-bunched using a laser modulation techinque with the Compton wavelength at a harmonic of the seeding laser before the main laser Compton scattering for EUV generation. A considerating scheme for the compact EUV source based on the laser Compton scattering with micro-bunched electron beam and the analytical study of micro-bunch generation are described in this paper.

元の言語English
ページ(範囲)1112-1115
ページ数4
ジャーナルRadiation Physics and Chemistry
78
発行部数12
DOI
出版物ステータスPublished - 2009 12

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scattering
lasers
electron beams
photocathodes
inoculation
high power lasers
lithography
direct current
harmonics
modulation
pulses
wavelengths

ASJC Scopus subject areas

  • Radiation

これを引用

Kashiwagi, S., Kato, R., Isoyama, G., Sakaue, K., Masuda, A., Nomoto, T., ... Urakawa, J. (2009). Development of compact coherent EUV source based on laser Compton scattering. Radiation Physics and Chemistry, 78(12), 1112-1115. https://doi.org/10.1016/j.radphyschem.2009.05.006

Development of compact coherent EUV source based on laser Compton scattering. / Kashiwagi, S.; Kato, R.; Isoyama, G.; Sakaue, Kazuyuki; Masuda, A.; Nomoto, T.; Gowa, T.; Washio, Masakazu; Kuroda, R.; Urakawa, J.

:: Radiation Physics and Chemistry, 巻 78, 番号 12, 12.2009, p. 1112-1115.

研究成果: Article

Kashiwagi, S, Kato, R, Isoyama, G, Sakaue, K, Masuda, A, Nomoto, T, Gowa, T, Washio, M, Kuroda, R & Urakawa, J 2009, 'Development of compact coherent EUV source based on laser Compton scattering', Radiation Physics and Chemistry, 巻. 78, 番号 12, pp. 1112-1115. https://doi.org/10.1016/j.radphyschem.2009.05.006
Kashiwagi, S. ; Kato, R. ; Isoyama, G. ; Sakaue, Kazuyuki ; Masuda, A. ; Nomoto, T. ; Gowa, T. ; Washio, Masakazu ; Kuroda, R. ; Urakawa, J. / Development of compact coherent EUV source based on laser Compton scattering. :: Radiation Physics and Chemistry. 2009 ; 巻 78, 番号 12. pp. 1112-1115.
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AU - Kato, R.

AU - Isoyama, G.

AU - Sakaue, Kazuyuki

AU - Masuda, A.

AU - Nomoto, T.

AU - Gowa, T.

AU - Washio, Masakazu

AU - Kuroda, R.

AU - Urakawa, J.

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KW - Coherent

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KW - Free electron laser (FEL)

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KW - Micro-bunched beam

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