Development of pressure sensitive molecular film as a measurement technique for micro-and nano-devices

Hideo Mori*, Yu Matsuda, Tomohide Niimi, Hiroyuki Uenishi, Yoshiki Sakazaki

*この研究の対応する著者

研究成果: Conference contribution

抄録

Gas flows in micro- and nano-systems having high Knudsen number must be treated as molecular flows, and experimental analyses of thermo-fluid phenomena in micro- and nano-systems need measurement techniques employing "molecular sensors". However, such measurement techniques are behind in development compared with molecular simulation techniques for numerical analyses. Pressure sensitive paint (PSP) technique is based on the interaction of oxygen molecules with luminescent molecules, and it seems suitable for analyses of high Knudsen number flows, which require diagnostic tools in the molecular level. In this study, we fabricate pressure sensitive molecular films (PSMF) with very small thickness based on the PSP technique and the Langmuir-Blodgett (LB) film technique. It is clarified that the PSMF composed of palladium (II) mesoporphyrin IX (PdMP) as a luminophore and arachidic acid as a buffer has comparable pressure sensitivity with conventional PSPs in low pressure regime with high Knudsen number, even if the amount of the luminescent molecules in the PSMF layer is much smaller than that in conventional PSPs. The results indicate the feasibility of PSMF technique for pressure measurement in high Knudsen number flows such as micro flows.

本文言語English
ホスト出版物のタイトル2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
DOI
出版ステータスPublished - 2006
外部発表はい
イベント2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS - Nagoya, Japan
継続期間: 2006 11月 52006 11月 8

出版物シリーズ

名前2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS

Other

Other2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
国/地域Japan
CityNagoya
Period06/11/506/11/8

ASJC Scopus subject areas

  • 計算力学
  • 制御およびシステム工学
  • 人的要因と人間工学

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