Development of standards for reliable surface analyses by ISO technical committee 201 on surface chemical analysis

C. J. Powell, R. Shimizu, K. Yoshihara, Shingo Ichimura

研究成果: Article

3 引用 (Scopus)

抄録

The need for reliable surface analyses together with quality-management requirements for analytical laboratories led the International Organization for Standardization (ISO) to formits Technical Committee (TC) 201 on Surface Chemical Analysis in 1991. This article describes the organization of TC 201, the strategies that have been found useful for identifying and assessing possible projects for new international standards, and the 57 international standards and other documents prepared to date by TC 201. Standards have now been developed for Auger-electron spectroscopy, glow-discharge spectroscopy, various types of scanning probe microscopy, secondary-ion mass spectrometry, sputter-depth profiling, total-reflection X-ray fluorescence spectroscopy, X-ray photoelectron spectroscopy, and X-ray reflectometry. In addition, standards have been developed with definitions of terms used in surface chemical analysis; the handling, preparation of specimens for surface analysis; information and data-transfer formats; and methods for determining the lateral resolution of beam-based methods of surface analysis.

元の言語English
ページ(範囲)127-134
ページ数8
ジャーナルSurface and Interface Analysis
47
発行部数1
DOI
出版物ステータスPublished - 2015 1 1
外部発表Yes

Fingerprint

standardization
chemical analysis
Standardization
Surface analysis
Chemical analysis
Scanning probe microscopy
Depth profiling
Quality management
Glow discharges
Auger electron spectroscopy
Data transfer
information transfer
Secondary ion mass spectrometry
x rays
X ray photoelectron spectroscopy
glow discharges
spectroscopy
secondary ion mass spectrometry
Auger spectroscopy
format

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

これを引用

Development of standards for reliable surface analyses by ISO technical committee 201 on surface chemical analysis. / Powell, C. J.; Shimizu, R.; Yoshihara, K.; Ichimura, Shingo.

:: Surface and Interface Analysis, 巻 47, 番号 1, 01.01.2015, p. 127-134.

研究成果: Article

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