Diamond deposition on a large-area substrate by plasma-assisted chemical vapor deposition using an antenna-type coaxial microwave plasma generator

Engineering & Materials Science

• Chemical vapor deposition 93%
• Diamonds 80%
• Plasmas 74%
• Microwaves 71%
• Substrates 56%
• Antennas 52%
• Silicon wafers 24%
• Methane 18%
• Hydrogen 16%
• Silicon 15%

Physics & Astronomy

• plasma generators 100%
• antennas 70%
• diamonds 64%
• vapor deposition 61%
• microwaves 54%
• semiempirical equations 29%
• hydrogen plasma 22%
• silicon 21%
• methane 18%
• wafers 15%