Diamond-like carbon films deposited without deposition particles of large incidence angles by sputtering

Y. Hoshi*, E. Suzuki, T. Osaka

*この研究の対応する著者

研究成果査読

7 被引用数 (Scopus)

抄録

Deposition of diamond-like carbon (DLC) films at liquid nitrogen temperature (77 K) under the control of the angular distribution of depositing particles was attempted using a DC facing target sputtering system. The film deposited at 77 K, the liquid-nitrogen temperature, has a much higher density and higher hardness than the film deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the film.

本文言語English
ページ(範囲)51-55
ページ数5
ジャーナルJournal of Magnetism and Magnetic Materials
176
1
DOI
出版ステータスPublished - 1997 12

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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