Diamond-like carbon films deposited without deposition particles of large incidence angles by sputtering

Y. Hoshi, E. Suzuki, Tetsuya Osaka

研究成果: Article

7 引用 (Scopus)

抄録

Deposition of diamond-like carbon (DLC) films at liquid nitrogen temperature (77 K) under the control of the angular distribution of depositing particles was attempted using a DC facing target sputtering system. The film deposited at 77 K, the liquid-nitrogen temperature, has a much higher density and higher hardness than the film deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the film.

元の言語English
ページ(範囲)51-55
ページ数5
ジャーナルJournal of Magnetism and Magnetic Materials
176
発行部数1
出版物ステータスPublished - 1997 12

Fingerprint

Diamond like carbon films
Sputtering
incidence
sputtering
diamonds
Liquid nitrogen
carbon
Hardness
liquid nitrogen
hardness
Angular distribution
Temperature
angular distribution
direct current
temperature
room temperature

ASJC Scopus subject areas

  • Condensed Matter Physics

これを引用

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