Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.
|出版ステータス||Published - 1984 12月 1|
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