Dielectric properties of plasma-polymerized tetrafluoroethylene films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A plasma-polymerized tetrafluoroethylene film has dielectric loss peaks below -50degC and approximately at 40degC. The effects of the substrate temperature during polymerization and of plasma irradiation after polymerization on the appearance of the peaks were studied. The low-temperature peak seems to be due to local-mode relaxation of polar groups, while the high-temperature peak seems to be due to phase transition.

本文言語English
ページ(範囲)1042-1046
ページ数5
ジャーナルJapanese journal of applied physics
27
6R
DOI
出版ステータスPublished - 1988 6

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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