Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki*, Toshitsugu Ueda

*この研究の対応する著者

    研究成果査読

    5 被引用数 (Scopus)

    抄録

    In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.

    本文言語English
    ジャーナルIEEJ Transactions on Sensors and Micromachines
    130
    3
    DOI
    出版ステータスPublished - 2010

    ASJC Scopus subject areas

    • 電子工学および電気工学
    • 機械工学

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