Digital integrator in scanning Auger electron microscopy

K. Goto, S. Ichimura, R. Shimizu

研究成果: Article査読

抄録

A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

本文言語English
ページ(範囲)95-97
ページ数3
ジャーナルReview of Scientific Instruments
51
1
DOI
出版ステータスPublished - 1980 12 1
外部発表はい

ASJC Scopus subject areas

  • Instrumentation

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