Dimension optimization for a miniature high-frequency quartz resonatore

Jing Ji, Meng Zhao, Yupeng Zhang, Satoshi Ikezawa, Toshitsugu Ueda

    研究成果: Conference contribution

    1 引用 (Scopus)

    抜粋

    In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25% of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.

    元の言語English
    ホスト出版物のタイトルIEEE SENSORS 2013 - Proceedings
    DOI
    出版物ステータスPublished - 2013
    イベント12th IEEE SENSORS 2013 Conference - Baltimore, MD
    継続期間: 2013 11 42013 11 6

    Other

    Other12th IEEE SENSORS 2013 Conference
    Baltimore, MD
    期間13/11/413/11/6

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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  • これを引用

    Ji, J., Zhao, M., Zhang, Y., Ikezawa, S., & Ueda, T. (2013). Dimension optimization for a miniature high-frequency quartz resonatore. : IEEE SENSORS 2013 - Proceedings [6688411] https://doi.org/10.1109/ICSENS.2013.6688411