Dimension optimization for a miniature high-frequency quartz resonatore

Jing Ji, Meng Zhao, Yupeng Zhang, Satoshi Ikezawa, Toshitsugu Ueda

    研究成果: Conference contribution

    1 引用 (Scopus)

    抄録

    In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25% of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.

    元の言語English
    ホスト出版物のタイトルIEEE SENSORS 2013 - Proceedings
    DOI
    出版物ステータスPublished - 2013
    イベント12th IEEE SENSORS 2013 Conference - Baltimore, MD
    継続期間: 2013 11 42013 11 6

    Other

    Other12th IEEE SENSORS 2013 Conference
    Baltimore, MD
    期間13/11/413/11/6

    Fingerprint

    Quartz
    Resonators
    Linear regression
    Regression analysis
    MEMS
    Electrodes

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    これを引用

    Ji, J., Zhao, M., Zhang, Y., Ikezawa, S., & Ueda, T. (2013). Dimension optimization for a miniature high-frequency quartz resonatore. : IEEE SENSORS 2013 - Proceedings [6688411] https://doi.org/10.1109/ICSENS.2013.6688411

    Dimension optimization for a miniature high-frequency quartz resonatore. / Ji, Jing; Zhao, Meng; Zhang, Yupeng; Ikezawa, Satoshi; Ueda, Toshitsugu.

    IEEE SENSORS 2013 - Proceedings. 2013. 6688411.

    研究成果: Conference contribution

    Ji, J, Zhao, M, Zhang, Y, Ikezawa, S & Ueda, T 2013, Dimension optimization for a miniature high-frequency quartz resonatore. : IEEE SENSORS 2013 - Proceedings., 6688411, 12th IEEE SENSORS 2013 Conference, Baltimore, MD, 13/11/4. https://doi.org/10.1109/ICSENS.2013.6688411
    Ji J, Zhao M, Zhang Y, Ikezawa S, Ueda T. Dimension optimization for a miniature high-frequency quartz resonatore. : IEEE SENSORS 2013 - Proceedings. 2013. 6688411 https://doi.org/10.1109/ICSENS.2013.6688411
    Ji, Jing ; Zhao, Meng ; Zhang, Yupeng ; Ikezawa, Satoshi ; Ueda, Toshitsugu. / Dimension optimization for a miniature high-frequency quartz resonatore. IEEE SENSORS 2013 - Proceedings. 2013.
    @inproceedings{c1a273713f0e4b5a872d1c7fde68a29e,
    title = "Dimension optimization for a miniature high-frequency quartz resonatore",
    abstract = "In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25{\%} of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.",
    author = "Jing Ji and Meng Zhao and Yupeng Zhang and Satoshi Ikezawa and Toshitsugu Ueda",
    year = "2013",
    doi = "10.1109/ICSENS.2013.6688411",
    language = "English",
    isbn = "9781467346405",
    booktitle = "IEEE SENSORS 2013 - Proceedings",

    }

    TY - GEN

    T1 - Dimension optimization for a miniature high-frequency quartz resonatore

    AU - Ji, Jing

    AU - Zhao, Meng

    AU - Zhang, Yupeng

    AU - Ikezawa, Satoshi

    AU - Ueda, Toshitsugu

    PY - 2013

    Y1 - 2013

    N2 - In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25% of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.

    AB - In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25% of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.

    UR - http://www.scopus.com/inward/record.url?scp=84893957364&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84893957364&partnerID=8YFLogxK

    U2 - 10.1109/ICSENS.2013.6688411

    DO - 10.1109/ICSENS.2013.6688411

    M3 - Conference contribution

    SN - 9781467346405

    BT - IEEE SENSORS 2013 - Proceedings

    ER -