In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-μm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.
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