The effect of 20 MeV electron and neutron irradiation on the cathodoluminescence (CL) spectra of nitrogen-doped CVD diamond has been investigated. The center called 5RL and the center with a zero-phonon line at 3.19 eV (389 nm) are induced by irradiation alone. The center with a zero-phonon line at 2.16 eV (575 nm) has been formed by annealing at 900°C subsequent to the irradiation. The distributions of these centers have been revealed by CL imaging.
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