Effect of introduced fluorine on electrical breakdown characteristics of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

研究成果: Article › 査読

1 被引用数 (Scopus)

本文言語	English
ページ（範囲）	343-350
ページ数	8
ジャーナル	IEEJ Transactions on Fundamentals and Materials
巻	109
号	8
DOI	https://doi.org/10.1541/ieejfms1972.109.343
出版ステータス	Published - 1989

ASJC Scopus subject areas

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