Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric

Tsubasa Kashizaki; Motohiro Tomita; Kazuaki Katayama; Takumi Hoshina; Takeo Matsuki; Sylvia Yuk Yee Chung; Takanobu Watanabe

doi:10.35848/1347-4065/ac3eb8

Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO₂inter-layer dielectric

Tsubasa Kashizaki^*, Motohiro Tomita, Kazuaki Katayama, Takumi Hoshina, Takeo Matsuki, Sylvia Yuk Yee Chung, Takanobu Watanabe

^*この研究の対応する著者

基幹理工学部

研究成果: Article › 査読

抄録

Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

本文言語	English
論文番号	SC1017
ジャーナル	Japanese journal of applied physics
巻	61
号	SC
DOI	https://doi.org/10.35848/1347-4065/ac3eb8
出版ステータス	Published - 2022 5月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.35848/1347-4065/ac3eb8

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引用スタイル

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title = "Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric",

abstract = "Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG. ",

keywords = "Si nanowire (NW), heat guide (HG), thermoelectric (TE) generator",

author = "Tsubasa Kashizaki and Motohiro Tomita and Kazuaki Katayama and Takumi Hoshina and Takeo Matsuki and Chung, {Sylvia Yuk Yee} and Takanobu Watanabe",

note = "Funding Information: This work was supported by CREST, JST Grant No. JPMJCR19Q5. A part of this work was conducted at NIMS Nanofabrication Platform, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, Grant No. JPMXP09F20NM0035. Publisher Copyright: {\textcopyright} 2022 The Japan Society of Applied Physics.",

year = "2022",

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doi = "10.35848/1347-4065/ac3eb8",

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T1 - Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric

AU - Kashizaki, Tsubasa

AU - Tomita, Motohiro

AU - Katayama, Kazuaki

AU - Hoshina, Takumi

AU - Matsuki, Takeo

AU - Chung, Sylvia Yuk Yee

AU - Watanabe, Takanobu

N1 - Funding Information: This work was supported by CREST, JST Grant No. JPMJCR19Q5. A part of this work was conducted at NIMS Nanofabrication Platform, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, Grant No. JPMXP09F20NM0035. Publisher Copyright: © 2022 The Japan Society of Applied Physics.

PY - 2022/5

Y1 - 2022/5

N2 - Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

AB - Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

KW - Si nanowire (NW)

KW - heat guide (HG)

KW - thermoelectric (TE) generator

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