The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.
|出版ステータス||Published - 1988|
|イベント||Proceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China|
継続期間: 1988 9 12 → 1988 9 16
|Other||Proceedings - Second International Conference on Properties and Applications of Dielectric Materials|
|Period||88/9/12 → 88/9/16|
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