Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Hayato Ichihashi*, Takahiko Yanagitani, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa

*この研究の対応する著者

研究成果: Conference contribution

15 被引用数 (Scopus)

抄録

ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [vS = (c66/ρ)1/2 and vL = (c11/ρ)1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc0.41Al0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

本文言語English
ホスト出版物のタイトルIEEE International Ultrasonics Symposium, IUS
出版社IEEE Computer Society
ページ2521-2524
ページ数4
ISBN(電子版)9781479970490
DOI
出版ステータスPublished - 2014 10月 20
外部発表はい
イベント2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
継続期間: 2014 9月 32014 9月 6

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
国/地域United States
CityChicago
Period14/9/314/9/6

ASJC Scopus subject areas

  • 音響学および超音波学

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