Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Hayato Ichihashi, Takahiko Yanagitani, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa

研究成果: Conference contribution

9 引用 (Scopus)

抄録

ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [v<inf>S</inf> = (c<inf>66</inf>/ρ)<sup>1/2</sup> and v<inf>L</inf> = (c<inf>11</inf>/ρ)<sup>1/2</sup>] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc<inf>0.41</inf>Al<inf>0.59</inf>N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

元の言語English
ホスト出版物のタイトルIEEE International Ultrasonics Symposium, IUS
出版者IEEE Computer Society
ページ2521-2524
ページ数4
ISBN(印刷物)9781479970490
DOI
出版物ステータスPublished - 2014 10 20
外部発表Yes
イベント2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
継続期間: 2014 9 32014 9 6

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
United States
Chicago
期間14/9/314/9/6

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S waves
scattering
longitudinal waves
elastic properties
resonators
shear

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

これを引用

Ichihashi, H., Yanagitani, T., Suzuki, M., Takayanagi, S., & Matsukawa, M. (2014). Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. : IEEE International Ultrasonics Symposium, IUS (pp. 2521-2524). [6932363] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2014.0629

Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. / Ichihashi, Hayato; Yanagitani, Takahiko; Suzuki, Masashi; Takayanagi, Shinji; Matsukawa, Mami.

IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. p. 2521-2524 6932363.

研究成果: Conference contribution

Ichihashi, H, Yanagitani, T, Suzuki, M, Takayanagi, S & Matsukawa, M 2014, Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. : IEEE International Ultrasonics Symposium, IUS., 6932363, IEEE Computer Society, pp. 2521-2524, 2014 IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 14/9/3. https://doi.org/10.1109/ULTSYM.2014.0629
Ichihashi H, Yanagitani T, Suzuki M, Takayanagi S, Matsukawa M. Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. : IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society. 2014. p. 2521-2524. 6932363 https://doi.org/10.1109/ULTSYM.2014.0629
Ichihashi, Hayato ; Yanagitani, Takahiko ; Suzuki, Masashi ; Takayanagi, Shinji ; Matsukawa, Mami. / Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. pp. 2521-2524
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