Effects of conductive oxide electrode by wet process on film properties of ferroelectric films

Effects of the conductive oxide electrode, Sr_0.3 LaCoO₃ (SLCO) formed by alkoxide solutions, on characteristics of the ferroelectric Pb_1.1 La_0.03 Zr_0.5 Ti_0.5 O₃ (PLZT) film formed by metallic polymer solution have been investigated. The SLCO electrode has perovskite structure which is the same as that of PLZT film and improves the PLZT film properties, higher crystallinity and higher packing density. Moreover, the SLCO electrode suppresses the Pb diffusion into Pt electrode. The SLCO electrode increases remanent polarization (Pr) and leakage current of the PLZT film. Especially for low applied voltage region, the SLCO electrode increases Pr value more than that on Pt electrode. The fatigue characteristics was not changed by the SLCO electrode. The optimization of excess Pb is necessary to decrease leakage current and to improve fatigue characteristics.